New Advanced Fabrication Technique for Millimeter-Wave Planar Components based on Fluororesin Substrates using Graft Polymerization

Abstract

As the importance of advanced millimeter-wave diagnostics increases, a reliable and accurate fabrication technique for high-performance devices and relevant components is essential. We describe a new improved fabrication technique for millimeter-wave planar components, such as antennas using low-loss fluororesin substrates. A fragile adhesion between the copper foil and fluororesin substrate and the accuracy of the device pattern using conventional fabrication techniques have been prime suspects in the failure of the devices. In order to solve these problems, surface treatment of fluororesin films and a fabrication method using electro-fine-forming (EF2) are proposed. The peel adhesion strength between the metal and fluororesin films and the value of the dielectric constant of the fluororesin films before and after grafting are reported. A prototype antenna using conventional fluororesin substrates and grafted-poly(tetrafluoroethylene) (PTFE) films produced using the EF2 fabrication technique are also introduced.