Abstract
In order to eliminate the influence of the hysteresis, creep and nonlinear of the piezoelectric ceramic and other influence of the outside factors, the adaptive neural PSD control algorithm is proposed to implement the real-time control of the micro-positioning workpiece table. The experiment result verifies the validity of the close-loop control. The displacement precision is 0.01 ìm, and response time is less than 0.1s.
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