Abstract
Photocrosslinkable silicone-containing graft polymers were synthesized using silicone-macromonomer; 0.5 μm line and space patterns were accurately fabricated by O 2RIE using the graft polymers as the top layer on phenol novolak resin. TEM observation of the graft polymer indicated the phase separation of the silicone chain from the hydrocarbon chain. The phase separation enhanced the photocrosslinking efficiency of the graft polymer.
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