Abstract
The electrical properties of nanocomposite SiAlzOxNy(Si) films containing Si nanoclusters embedded into amorphous SiAlzOxNy matrix have been studied by measurements of DC current-voltage and AC capacitance-voltage characteristics. Analysis of the results allowed us to conclude the existence of a negative dielectric constant. The temperature dependence of the negative dielectric constant has been obtained and analyzed. The negative capacitance has been revealed during measurements of capacitance-voltage characteristics at testing signal frequency of 2 kHz. The negative capacitance also points out the appearance of a negative dielectric constant effect. The qualitative model for explanation of negative dielectric constant based on peculiarities of SiAlzOxNy(Si) films polarization due to electron capture at Si nanoparticles-amorphous SiAlzOxNy matrix interface traps near cathode region has been proposed. In the case of AC C-U measurements, a negative capacitance is observed if conductivity current through the nanocomposite film is relatively high.
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