Abstract
Non-evaporable getter (NEG) thin films for residual gases control in micro-electro-mechanical systems (MEMS) cavities after sealing are considered. For this study, several getters are deposited and analyzed in terms of sorption performances, microstructure and activation mechanism. Compared to single layer evaporated titanium reference, the addition of a sub-layer is shown to decrease the activation temperature of the NEG. Effective pumping of nitrogen is monitored by Residual Gas Analysis (RGA). Microstructure investigation by Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) reveals no apparent modification in NEG morphology due to sub-layer addition. X-ray Photoelectron Spectroscopy (XPS) and depth profiling monitoring of NEG activation under high vacuum conditions (10−8 mbar) shows the dissolution of the NEG surface oxide in the getter bulk, along with the formation of carbide and nitride compounds. These results are in good agreement with already published results on getter alloys.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
