Abstract
A novel type of slit probe incorporating a micromachined silicon (Si) chip for millimeter-wave scanning near-field microscopy is proposed.To improve the spatial resolution and image contrast attainable in millimeter-wave microscopy, a metal-coated Si chip with a microslit aperture fabricated using a bulk micromachining technique was attached to the tip of an ordinary slit-type probe at the end of a tapered rectangular waveguide. The design and fabrication of the Si chip are described, and the results from experiments performed at U-band (40–60 GHz) frequencies to demonstrate the feasibility of this new probe configuration are presented. © 2011 Wiley Periodicals, Inc. Microwave Opt Technol Lett 53:660–664, 2011; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.25793
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