Abstract
We have developed a vibrating microsensor allowing simultaneous measurement of density and viscosity in liquids. A small-sized spherical oscillating probe is immersed in the liquid and is connected to a microcantilever driven in flexural vibration by a piezoelectric transducer. Cantilever resonance parameters (frequency and damping) are used to measure the probe–fluid interaction. The developed analytical model enables us to compute fluid characteristics from measured data by solving the inverse problem. Measurements performed for various fluids are compared to literature data. Investigation depth of the sensor is determined by studying the effect of the presence of an immersed wall in the vicinity of the probe.
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