Abstract
Nanowire FETs With Nearly Single-Crystalline Si Channels by NiSi<sub>2</sub>-Seed Initiated Lateral Epitaxial Crystallization (SILEC)
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https://doi.org/10.1109/led.2023.3335922
Journal: IEEE Electron Device Letters | Publication Date: Jan 1, 2024 |
Nanowire FETs With Nearly Single-Crystalline Si Channels by NiSi<sub>2</sub>-Seed Initiated Lateral Epitaxial Crystallization (SILEC)
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