Abstract

On the basis of practical machining,influences of structural parameters of a restrictor on the load-bearing characteristics of hydrostatic guideway in the Nanosys-1000 ultra precision machine tool were analyzed.The fluid analysis software was used to establish the finite element model of a carrying oil pad and build a related hydrostatic guideway test bench. The pressure field distributioncharacteristics of the carrying oil pad when its inlet pressure was 1.7 MPa and the oil film thickness was 36μm were researched.By integrating the pressure to get the oil film capacity,the oil film stiffness was obtained by derivation,and the effects of the different structural parameters on the loadbearing characteristics of hydrostatic guideway were revealed.The results show that the orifice diameter has the greatest impact on the load-bearing characteristics of the ultra precision machine tool,followed by the orifice hole length,while the entrance and export chamfers have little effect on it.When the guide load is lower,expanding the orifice diameter and shortening the hole length can help to improve the load-bearing characteristics of the hydrostatic guideway.However,narrowing the orifice diameter and increasing the length of the orifice hole would be more favorable.As compared with the simulation data and the experimental ones,data errors of three capacity measuring points are7.9%,6.9%,8.6%,respectively.Finally,according to research results,the restrictor structural parameters of hydrostatic guideway in the Nanosys-1000 ultra precision machine tool were determined.

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