Abstract
Free standing zone plates can be used to focus and monochromatize atom beams. A method for manufacturing free-standing silicon zone plates is described. Zone plates with 100 nm and 50 nm outermost zone width have now been fabricated with this method. The zone plates are designed for focusing a helium atom beam at thermal energy. The focal length of the first diffraction order for a de Broglie wavelength of λ dB = 0.09nm is 300 mm. Initial measurements of the focusing properties of the zone plates have been made.
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