Abstract
Diamond-like carbon and boron nitride were deposited like nanostructered bilayer on Si/Si3N4 substrate, both with (100) crystallographic orientation, these films were deposited through pulsed laser technique (Nd: YAG: 8 Jcm-2, 9ns). Graphite (99.99%) and boron nitride (99.99%) targets used to growth the films in argon atmosphere. The thicknesses of bilayer were determined with a perfilometer, active vibration modes were analyzed using infrared spectroscopy (FTIR), finding bands associated around 1400 cm-1 for B – N bonding and bands around 1700 cm-1 associated with C=C stretching vibrations of non-conjugated alkenes and azometinic groups, respectively. The crystallites of thin films were analyzed using X-ray diffraction (XRD) and determinated the h-BN (0002), α-Si3N4 (101) phases. The aim of this study is to relate the dependence on physical and chemical characteristics of the system Si/Si3N4/DLC/BN with gas pressure adjusted at the 1.33, 2.67 and 5.33 Pa values.
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