Abstract
Cadmium titanate (CdTiO3) thin films with different concentrations of titanium dioxide (TiO2) were synthesized by magnetron co-sputtering method on to glass substrates. X-ray diffraction (XRD) patterns confirmed the formation of perovskite orthorhombic crystal structure at relatively low deposition temperature. The crystallinity of the films decreased with increase in TiO2 concentration due to structural deformation caused by differences in the ionic radii of the Cd2+ and Ti4+ atoms. The grain size value was found to decrease from 80 to 30nm and a blue shift of the optical band edge was observed. The CdTiO3 films with lower concentrations of TiO2 exhibited better methane (CH4) sensing properties (100ppm) at an operating temperature of 250°C with fast response and recovery time.
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