Abstract
Molybdenum trioxide thin films of different thicknesses were prepared on a glass substrate with the chemical spray pyrolysis technique. The X-ray diffraction pattern indicates the formation of an α-MoO3 phase with a polycrystalline nature. The field-emission scanning electron micrograph of the surface indicates nanostructured lamellar crystallites. The trimethylamine vapour sensing property of the film was studied by the chemiresistive method at room temperature (≈30°C). Film with a thickness of 520nm shows a response of 12% for 0.5ppm of TMA vapour in 54% relative humidity, with response and recovery times of 32s and 15s, respectively. The detection limit and sensing response of the α-MoO3 thin film in a mixed environment were analysed and reported.
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