Abstract
Nanocrystalline cadmium indium oxide (CdIn 2O 4) thin films of different thicknesses were deposited by chemical spray pyrolysis technique and utilized as a liquefied petroleum gas (LPG) sensors. These CdIn 2O 4 films were characterized for their structural and morphological properties by means of X-ray diffraction (XRD) and scanning electron microscope (SEM), respectively. The dependence of the LPG response on the operating temperature, LPG concentration and CdIn 2O 4 film thickness were investigated. The results showed that the phase structure and the LPG sensing properties changes with the different thicknesses. The maximum LPG response of 46% at the operation temperature of 673 K was achieved for the CdIn 2O 4 film of thickness of 695 nm. The CdIn 2O 4 thin films exhibited good response and rapid response/recovery characteristics to LPG.
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