Abstract
A nanostructure transition from solid solution (SS) Ti(N,C) to two-phase nanocrystalline (nc)-Ti(N,C)/amorphous (a)-(C,CNx) thin films was investigated using a combination of high-resolution transmission electron microscopy, x-ray diffraction, and x-ray photoelectron spectroscopy. The finding of the authors is that such a nanostructure transition was strongly controlled by the relative atomic ratio x[x≡(C+N)∕Ti]. The results indicated that SS Ti(N,C) and uncompleted and completed segregated two-phase nanocomposite nc-Ti(N,C)∕a-(C,CNx) were successively formed at x⩽1.0, 1.0<x<1.2, and x⩾1.2, respectively. Increase of the x values not only decreased the grain size and promoted the formation of more [200]-oriented nanocrystallites but also produced more disorders and defects in thin films. A maximum hardness was achieved for a SS Ti(N,C) structure at x=1.0. The corresponding nanostructure transition mechanism is also discussed.
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