Nanostructure and Co-rich regions of Plasma-free sputtered Co-Cr films

Abstract

150nm thick Co-20at%Cr films with c-axis oriented hcp structure prepared by a new facing targets sputtering coater were evaluated on nanostructure of initial-, middle-, and surface-layers. 5-10 nm sizes Co-rich regions separeted by 3-10 sized Cr-rich once were confirmed to be distributed within 10-30 nm sized crystalites and across crystallite boundaries on all specimens of any layers.