Nanosensors and MEMS: connecting the nanoscale with the macro world with microscale technology

Abstract

Purpose – This paper aims to illustrate how sensors can be fabricated by combining nanomaterials with micro-electromechanical system (MEMS) technology and to give examples of recently developed devices arising from this approach. Design/methodology/approach – Following a short introduction, this paper first identifies the benefits of MEMS technology. It then discusses the techniques for integrating carbon nanotubes with MEMS and provides examples of physical and molecular sensors produced by these methods. Combining other gas-responsive nanomaterials with MEMS is then considered and finally techniques for producing graphene on silicon devices are discussed. Brief concluding comments are drawn. Findings – This shows that many physical and molecular sensors have been developed by combining nanomaterials with MEMS technology. These have been fabricated by a diverse range of techniques which are often complex and multi-stage, but significant progress has been made and some are compatible with standard CMOS processes, yielding fully integrated nanosensors. Originality/value – This provides an insight into how two key technologies are being combined to yield families of advanced sensors.