Abstract
The ability to precisely ablate organic polymers and biological tissue with high spatial resolution and minimal thermal damage using uv excimer lasers has aroused much interest, both with regard to the basic mechanisms involved and the potential applications [1]. The apparently low thermal damage associated with uv lasers has been attributed to the fact that fast material removal occurs through a direct bond-breaking ‘ablative photodecomposition’ process [2]. It has, however, alternatively been suggested [3] that removal is due to localized thermal degradation in which the heat affected zone is restricted by the small penetration depth for radiation and short time available for heat flow. In general it is observed that thermal effects become more predominant at longer wavelengths.
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