Nanoscale Removal Processing by a Twin-Cylinder Tool

Abstract

A major problem for the implementation of microelectroremoval is the cost and the design of the tool electrode. An effective nanoscale processing for yield improvement was developed using microelectroremoval and a designed twin-cylinder tool as a precision reclamation retrieval system to remove the defective indium tin oxide (ITO) thin-film nanostructures from the optical PET surfaces of digital paper. By establishing a recycling process using the ultra-precise removal of nanostructures, the optoelectronic semiconductor industry can effectively recycle defective products, minimizing both production costs and pollution. In the current experiment, small thickness of the anode, combined with enough electric power and provided a larger discharge space, and better removal effect. A large diameter of the cylinder acthode accompanied by a small gap-width between the cathode and the workpiece, takes less time to do the same amount of ITO removal. A higher rate of removal of the defective ITO nanostructures corresponds to high temperature, a large electrolyte flow rate with a high rotational speed of the electrodes. A faster feed rate of color filters combined with a higher electric current produces a fast removal rate. A small edge angle of the anode also provides higher current density, which is advantageous for ITO removal.