Abstract
Problem statement: Nanotechnology is already a large sector of industry and science research and it is expected to continue to grow at very fast rate. The determination of absolute measurements of length at the nanometer scale and below is very difficult and expensive. So the nanoscale metrology standard is needed. Approach: The laser-focused atomic deposition is a new way to establish nanoscale pitch standards. When the atoms pass though laser standing wave field, the atoms will change the moving trajectory and be focused to the node (or antinode) of the laser standing wave according to the detuning of laser frequency and atomic resonant frequency. Because of the period of the laser standing wave, laser mask will form the anologue of an array of cylindrical lense. If a substrate is positioned at the focal plane of this lens array, a periodic structure is depositing onto the surface. The period of this structure is λ/2 of laser. Results: In this letter, a 425 nm laser light standing wave is used to focus a beam of chromium atoms to fabricate the nanoscale pitch standards sample of 213±0.1 nm. The height was 4 nm. The (FWHM) width of 64±6 nm. Conclusion/Recommendations: The period of this structure is λ2 of laser, whose spatial period can be traced directly to an atomic transtition frequency and the uncertainty possibility is 10-5, which is fitted to be as the nanopitch standards.
Highlights
Nanotechnology is already a large sector of industry and science research and it is expected to continue to grow at very fast rate (SAI, 1997)
The precise measurement and control for dimensions of very small objects is the key issue of nanotechnology in which the dimensions of these objects are below 100 nm and the precision requested frequently is of the order of 0.1 nm
McClelland et al (2003), have made chromium lines as a highly accurate nanoscale length standard by laser-focused atomic deposition and demonstrated that pitch standards with absolute uncertainties of a few parts in10-5 are possible with this technique (McClelland et al, 2003)
Summary
Nanotechnology is already a large sector of industry and science research and it is expected to continue to grow at very fast rate (SAI, 1997). The technique of laser-focused atomic deposition is a new way to establish nanoscale pitch standards. Artifacts made by this method can be traced directly to an atomic transition frequency. McClelland et al (2003), have made chromium lines as a highly accurate nanoscale length standard by laser-focused atomic deposition and demonstrated that pitch standards with absolute uncertainties of a few parts in are possible with this technique (McClelland et al, 2003). Nanotech., 2 (2): 127-131, 2011 periodic nanometerscale structures by laser-focused atomic deposition (Timp et al, 1992; McClelland et al, 1993; Sligte et al, 2004; McGowan et al, 1995; Rehse et al, 2000; Fioretti et al, 2005). In these experiments atoms are focused to the desired pattern by the optical dipole force which results from intensity gradients in a light field
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