Nanoscale defect formation on InP surface by swift gold ion impact

Abstract

The atomic force microscopy (AFM) was used to image nanoscale defect on InP surface induced by 100 MeV Au 8+ ions. These defects manifest themselves as pits or hillocks in AFM images depending on the scan direction. The nuclear energy loss ( S n) of swift heavy ion was found to be a decisive parameter for the creation of nanoscale defects, which otherwise supposed to be neglected at the surface for inelastic electronic energy loss ( S e) dominant processes.