Abstract
Nanoporous films on substrate with one-dimensional (1D) nanochannels were fabricated by anodic oxidation, and their gas sensing properties were investigated. For this, Sn films of thick were deposited on substrate by thermal evaporation and anodized in an electrolyte of 0.3 M oxalic acid. Subsequent annealing at completely transformed amorphous anodic oxide into crystalline , which was confirmed by X-ray diffraction. During annealing, both 1D nanoporous structure and adhesion to the substrate were maintained. The pore shape was more or less spherical, and the channel diameter and wall thickness were and , respectively. The Pt-patterned nanoporous film sensor responded to , , and CO gases with a relatively short response time. It showed the highest gas response of toward 1.0% at and exhibited the linear concentration dependence and high selectivity toward against CO or . The sensing performance of the nanoporous film sensor was compared with that of the thermally oxidized film sensor without the anodizing step and commercial powder sensor.
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