Abstract
Blistering of Pd films upon absorption of high concentration hydrogen is one of the big problems for hindering wide application of Pd-film hydrogen sensors. We fabricated robust nanoporous Pd sensors with anodic aluminum oxide (AAO) as a substrate and Ni as a transition layer. The resistive sensors have a quick and reversible response to hydrogen gas at room temperature. Unlike dense Pd films supported by traditional wafers, the AAO-supported nanoporous films are highly stable in detecting high concentration hydrogen (up to 10% H 2 ).
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