Abstract
A new transmission-type electron multiplier was fabricated from silicon-on-insulator (SOI)material by integrating an array of one-dimensional (1D) silicon nanopillars onto atwo-dimensional (2D) silicon membrane. Primary electrons are injected into thenanopillar–membrane (NPM) system from the flat surface of the membrane, while electronemission from the nanopillars is probed by an anode. The secondary electron yield (SEY)from the nanopillars in the current device is found to be about 1.8 times that of the plainsilicon membrane. This gain in electron number is slightly enhanced by the electric fieldapplied from the anode. Further optimization of the dimensions of the NPM and anapplication of field emission promise an even higher gain for detector applications and allowfor probing of electronic/mechanical excitations in an NPM system stimulated by incidentparticles or radiation.
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