Abstract
The nanomechanical properties of barium strontium titanate (Ba x Sr 1− x TiO 3, x = 0–1) deposited on a silicon substrate were investigated using the metalorganic deposition method. The characteristics of the Ba x Sr 1− x TiO 3 thin film's crystalline structure and surface roughness were achieved by means of X-ray diffraction (XRD) and atomic force microscopy (AFM). The results indicated that as the Ba content was decreased and therefore the Sr content was increased a lower leakage current density and a smaller grain size were obtained. Also the mechanical properties such as hardness, Young's modulus and contact stress–strain were also studied by nanoindentation.
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