Abstract
Coating properties and performance can be tailor-designed by proper control of nano structure andprocess conditions. This paper presents two examples: first, the synthesis and optimization of 1 nm thick nitrogenated carbon (CNx) nano-layers as protective overcoats in extremely highdensity harddisksystems, and, second, the development of multilayer coatings for wear protection at elevated temperatures. Synthesis of these coatings was done by magnetron sputtering. These studies demonstrate that one canproduce atomically smooth 1 nmthickCNxovercoatswith acceptable corrosionperformance. In addition, this paper shows that, with the proper choice of nanolayer thickness and process conditions, superhard coatings based on TiN/SiNx and TiB2/TiC multilayers with high thermal stability, low internal stress, and high wear resistance can be synthesized.
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