Abstract
The zinc oxide (ZnO) thin film was deposited on Polyethlene terephthalate (PET) substrate by cathodic vacuum arc deposition (CVAD). Nanoindentation evaluation with different loads, load times and hold times was performed to analyze material mechanical properties such as pop-in effect, elasticity and adhesion. The scratch test mode was studied to identify the scratch failure mechanisms and detect critical normal loads. Results showed that cathodic vacuum arc deposited ZnO thin films have good elastic restoring force with different kinds of load-displacement methods and a high delamination load.
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