Abstract
Abstract To clarify the physical and tribological properties of pure amorphous carbon films, nanoindentation and scanning-scratched wear tests were conducted on pure amorphous carbon films, diamond and graphite, by using an atomic force microscope with a diamond tip. Two types of pure amorphous carbon films (amorphous carbon 1 and amorphous carbon 2) were deposited on silicon substrates. To evaluate the tribological characteristics of the surface layers of the films, the thickness of the films was set at about 50nm to eliminate the substrate effect. Deposition was performed by electron cyclotron resonance plasma sputtering. The internal stress of amorphous carbon film was compressive and it was about 0·4 GPa for the amorphous carbon films and 1·4 GPa for the amorphous carbon 2 films. Raman spectra of the amorphous carbon films showed an amorphous graphite-like structure. Auger electron spectroscopy, secondary-ion mass spectroscopy and Rutherford back-scattering spectroscopy showed that the deposited films...
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