Abstract
Optic fluidic devices, which combine optical elements such as adaptive optical lenses or diffraction gratings into micro-fluidic devices, are now becoming increasingly important for environmental monitoring, medical diagnostics and chemical detection. In this paper, we present a novel and simple micro/nanofabrication process for SU-8 based optic fluidics structures with phase gratings on the bottom of the micro-channel using our silicon grating templates. The refraction index difference between the fluid and the SU-8 gratings generates a modulation in the phase of the light passing through the device. Our method of fabricating optic fluidic device is promising to be economic in fabrication, high throughput in production and have potential applications for sensing.
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