Nanocrystalline Titanium Dioxide Dipped with AlCl2 as a Humidity Sensors

Abstract

Titanium dioxide and AlCl2 was mixed in different stoichiometry in mol wt. % for the study. By using the screen printing technique, the thick films of humidity sensors are prepared. All of the humidity sensor devices are tested and finally concluded that the sample T-1 at constant temperature 400C to 700C exhibited high sensitivity and fast response time to humidity sensing at room temperature. In the case of conductivity, curves are frequently crowded and mixed together. The conductivity of Sample films linearly responds to Relative Humidity. The resistance of thick films decreases by increasing the humidity of sensors at room temperatures due to surface oxygen vacancies of TiO2 acting as electron donors.