Abstract
ABSTRACT This paper reports the fabrication of nanocr ystalline Strontium Barium Bismuth Titanate Sr 1-x Ba x Bi 4 Ti 4 O 15 (SBBT) thin films for piezoelectric pressure sensors. The SBBT films and capacitance devices with structure of Al/TiO 2 /SBBT/TiO 2 /RuO 2 /SiO 2 /Si were fabricated using sol-gel technique. Different nanostructures of the films were prepared with un-annealed condition as well as after annealing at three temperatures; 400, 500 and 600 0 C, in air for 2 minutes. The nanostructure of SBBT thin films have been systematically studied by XRD, AFM, SEM and dielectric constant. For the sensor device measurement, the SBBT thin film pressure sensors were tested by pneumatic loading method at pressure range between 0 to 450 kPa. It was found that the sensing properties of the films were affected by the nanostructure of the films. It was show n that there was a linear relationship betw een the crystallization, grains size and dielectric properties with the sensing resp onse of the film towards pressure. The f ilm with higher crystallization, grains size and dielectric properties demonstrates better sensitivity and repeatability compared to others. The correlation between nanostructure of the SBBT films and the piezoe lectric pressure sensing pr operties will be discussed. Keywords: Nanocrystalline thin films; sol-gel; strontium bari um bismuth titanate; piezoelectric pressure sensor.
Published Version
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