Abstract
Mo-Ag-N coatings were prepared by d.c. magnetron sputtering technique from a Mo target with embedded Ag pellets, followed by vacuum annealing at 425, 500, and 600 °C, respectively, for 1 h. SEM, EDS, XRD, nanoindenter, and micro–macro tribometer were used to investigate the influence of Ag content and annealing temperature on their microstructure, surface morphology and mechanical properties. Results demonstrated that as-deposited Mo-Ag-N coatings consisted of fcc γ-Mo2N phase and fcc Ag phase where Ag uniformly distributed into Mo-N matrix. The hardness of Mo-Ag-N coatings initially increased and then decreased with Ag content, reaching the maximum hardness of 32 GPa at 4 at.% Ag, whereas friction coefficient decreased monotonously with Ag content increasing. With the increase of annealing temperature hardness, friction coefficient, and wear resistance were decreased due to the accumulation of a large amount of Ag agglomerates onto surface resulted from high temperature intriguing phase segregation and diffusion.
Published Version
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