Abstract
Among conductive oxide materials, niobium doped titanium dioxide has recently emerged as a stimulating and promising contestant for numerous applications. With carrier concentration tunability, high thermal stability, mechanical and environmental robustness, this is a material-of-choice for infrared plasmonics, which can substitute indium tin oxide (ITO). In this report, to illustrate great advantages of this material, we describe successful fabrication and characterization of niobium doped titanium oxide nanoantenna arrays aiming at surface-enhanced infrared absorption spectroscopy. The niobium doped titanium oxide film was deposited with co-sputtering method. Then the nanopatterned arrays were prepared by electron beam lithography combined with plasma etching and oxygen plasma ashing processes. The relative transmittance of the nanostrip and nanodisk antenna arrays was evaluated with Fourier transform infrared spectroscopy. Polarization dependence of surface plasmon resonances on incident light was examined confirming good agreements with calculations. Simulated spectra also present red-shift as length, width or diameter of the nanostructures increase, as predicted by classical antenna theory.
Highlights
IntroductionIn recent times, infrared nano-plasmonics shifts its interest from common noble metals or compounds like Au, Pt, Ag or TiN [1] to transparent conductive oxides as materials of choice [2]—namely, indium tin oxide [3,4,5,6,7,8,9], fluorine doped tin oxide [10,11], aluminum (or gallium) doped zinc oxide [12,13,14,15,16,17]
In recent times, infrared nano-plasmonics shifts its interest from common noble metals or compounds like Au, Pt, Ag or TiN [1] to transparent conductive oxides as materials of choice [2]—namely, indium tin oxide [3,4,5,6,7,8,9], fluorine doped tin oxide [10,11], aluminum doped zinc oxide [12,13,14,15,16,17]. Extensive research on those materials aims at both basic properties in infrared region as well as different applications such as wavelength-selective perfect absorbers and emitters [6,18,19] interacting plasmonic nano-particles [20,21,22,23], optical meta-surfaces [19], and active tunable plasmonic devices [7,19,24]
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Summary
In recent times, infrared nano-plasmonics shifts its interest from common noble metals or compounds like Au, Pt, Ag or TiN [1] to transparent conductive oxides as materials of choice [2]—namely, indium tin oxide [3,4,5,6,7,8,9], fluorine doped tin oxide [10,11], aluminum (or gallium) doped zinc oxide [12,13,14,15,16,17] Extensive research on those materials aims at both basic properties in infrared region as well as different applications such as wavelength-selective perfect absorbers and emitters [6,18,19] interacting plasmonic nano-particles [20,21,22,23], optical meta-surfaces [19], and active tunable plasmonic devices [7,19,24].
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