Abstract
We demonstrate an ultrahigh-sensitivity gas pressure sensor based on the Fabry-Perot interferometer employing a fiber-tip diaphragm-sealed cavity. The cavity is comprised of a silica capillary and ultrathin silica diaphragm with a thickness of 170 nm, with represents the thinnest silica diaphragm fabricated thus far by an electrical arc discharge technique. The resulting Fabry-Perot interferometer-based gas pressure sensor demonstrates a gas pressure sensitivity of about 12.22 nm/kPa, which is more than two orders of magnitude greater than that of a similarly configured fiber-tip air bubble sensor. Moreover, our gas pressure sensor has a low temperature cross-sensitivity of about 106 Pa/°C, and the sensor functions well up to a temperature of about 1000 °C. As such, the sensor can potentially be employed in high-temperature environments.
Highlights
The gas pressure sensitivity of the sensor with a cavity length of about 55 μm and a diaphragm thickness of less than 250 nm was measured to be 12.22 nm/kPa, which is more than two orders of magnitude greater than that of Fabry-Perot interferometers (FPIs)-based sensors employing an fiber-tip air bubble (FAB)
We have demonstrated a novel fabrication technology for creating an all-silica, nano-scale sensing diaphragm that can be employed for ultrahigh-sensitivity gas pressure sensors based on an FPI employing an fiber-tip diaphragm-sealed cavity (FDC)
The FPI-based gas pressure sensors employing an FDC demonstrate good high-temperature stability and ultrahigh gas pressure sensitivity, where a specimen sensor with a cavity length of about 55 μm exhibited a gas pressure sensitivity of 12.22 nm/kPa, which is more than two orders of magnitude greater than that of FPI-based gas pressure sensors employing an FAB
Summary
Shen Liu,Yiping Wang , Changrui Liao,Ying Wang, Jun He, Cailing Fu, KaimingYang, Zhiyong Bai & Feng Zhang. Liu et al demonstrated a promising electrical arc-discharge technique to create an air-cavity FPI-based gas pressure sensor in optical fiber[26], and this technique was further optimized to fabricate an FPI-based sensor employing a fiber-tip air bubble (FAB)[27] This fabrication method is very simple, and requires only a commercial fusion splicer without additional pressurization equipment. We present a novel method employed for fabricating an all-silica gas pressure sensor based on an FPI with a fiber-tip diaphragm-sealed cavity (FDC) This sensor employing an ultrathin all-silica sensing diaphragm with a thickness of about 170 nm has been achieved by means of an optimized electrical arc-discharge technique. The sensor was measured at a high-temperature of 1000 °C, and the cavity length temperature sensitivity was about 1300 pm/°C, whereas the temperature-induced gas pressure measurement error was less than 106 Pa/°C
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