Abstract
Micro-channel chips used in micro total analysis systems are attracting attention in the medical field. The photolithography technology used in semiconductor manufacturing is generally used to manufacture micro-channel chip dies. However, this technology requires many processes, such as mask fabrication and the application of photoresist to a substrate, as well as expensive clean room facilities. So, this study examines how to form a micro-groove by cutting with micro-endmills. This report experimentally examined cutting performance of shank run-out. As a result, effect of shank run-out on micro endmilling, such as decreasing cutting force was clarified. Specifically, a method was experimentally examined for reducing the influence of tool run-out on machining accuracy by using multi-tooth endmills by modifying the tool setting angle. Modifying the tool setting angle improved the surface roughness of the groove, and reduced change of cutting force in two-tooth square-endmilling. In addition, a modification of tool setting angle in endmilling reduced the influence of tool run-out on machining accuracy.
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