A18 微細溝加工における工具振れ回りが加工精度に及ぼす影響(OS6 切削加工(4))

Abstract

Microchannel chips used in micro total analysis systems are attracting attention in the medical field. The photolithography technology used in semiconductor manufacturing is generally used to manufacture microchannel chip dies. However, this technology requires many processes, such as mask fabrication and the application of photoresist to a substrate, as well as expensive clean room facilities. So, this study examins how to form a fine groove by cutting with micro endmills. This report experimentally examined cutting performance of tool run-out. As a result, effect of tool run-out on micro endmilling, such as decreasing cutting force was clarified.