パルスレーザー堆積法による酸化亜鉛系透明導電膜の有機基板上への成膜

Abstract

Approximately 300-nm-thick 1.5 wt.% Al-doped zinc oxide(AZO: 1.5 wt.% Al2O3) films have been deposited on glass substrates and PVC substrates at room temperature by a pulsed laser deposition (PLD) using ArF excimer laser (λ=193 nm). The film deposition was carried out under the condition of laser energy density with 2 to 5 J/cm2. For AZO films deposited on PVC substrates with low laser energy density, electrical and optical properties were equivalent to that for AZO films deposited on glass substrates. However, for AZO films prepared by high laser energy density, the value of surface roughness was large and the value of Hall mobility remarkably decreased compared to that for AZO films grown on glass substrates.