Abstract
In order to remove impurities (H2O and/or CO2) surface defects and improve the surface crystallinity of commercial (100) MgO single crystal, the complex WE/OA treatment was tried, in which substrates were annealed in the oxygen atmosphere after the H3PO4 wetetching. The spectra in cathodoluminescence at about 400 nm disappeared almost completely in the specimens by the WE/OA treatment at 1100°C as examined by the measurement of cathodoluminescence for MgO substrates. The halfwidth of X-ray diffraction peak, TEM images and electron diffraction patterns showed a good [100]-orientation of Pt films deposited on MgO substrates by the complex treatment at 1100°C.
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