Abstract
イオンビームスパッタ法における反跳Arの鉄薄膜特性に及ぼす影響
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https://doi.org/10.3379/jmsjmag.23.1229
Publication Date: Jan 1, 1999 | |
Citations: 2 | License type: open-access |
イオンビームスパッタ法における反跳Arの鉄薄膜特性に及ぼす影響
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