Abstract
The hydrogen retention properties of pure boron and oxidized boron films were evaluated by both the change of pressure during hydrogen glow discharge and thermal desorption spectroscopy (TDS). After hydrogen loading by glow discharge the absorption amount of hydrogen for the oxidized boron film was 20-30% smaller than that of the pure boron film. This result was almost consistent with that of TDS measurement. The concentration of oxygen at the top surface for the pure boron and the oxidized boron film was 5 at.%, 35 at.%, respectively. No change of the oxygen concentration for the oxidized boron film was observed.
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