Abstract
高周波マグネトロンスバッタリングによるYBaCuO系超伝導薄膜の膜厚特性
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https://doi.org/10.3131/jvsj.37.208
Journal: SHINKU | Publication Date: Jan 1, 1994 |
License type: free |
高周波マグネトロンスバッタリングによるYBaCuO系超伝導薄膜の膜厚特性
Join us for a 30 min session where you can share your feedback and ask us any queries you have