Abstract
Metal oxycarbide thin films, such as chromium oxycarbide, molybdenum oxycarbide and tungsten oxycarbide films have been synthesized on SUS 304 stainless steel for hard coating at a temperature of 673 K with metal, carbon dioxide and methane by an inductively coupled radiofrequency plasma assisted magnetron sputtering method. The maximum micro-Vickers hardness of the films is more than 20 GPa. X-ray diffraction measurements reveal that the structure of the oxycarbide films is cubic and the lattice constant of them is 0.42-0.43 nm. The films showing a high micro-Vickers hardness are composed of [110] orientated crystallites.
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