Abstract
Thin films containing chromium compound were prepared onto SUS 304 stainless steel and slide glass substrates by plasma decomposition of hexacarbonylchromium with hydrogen carrier gas. The chemical composition of the films was identified as chromium oxycarbide by XPS measurements, and the structure of was revealed as a face‐centered cubic structure by x‐ray diffraction experiments. Vickers hardness and the anodic polarization current density of the films were measured in order to investigate the properties of corrosion resistance. As a result, the film was found to have one of the best characteristics for coating the material to resist surface corrosion.
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