Abstract
An optical method for the nanogap measurement beyond the optical diffraction limit was reported.The function relationship between the nanogap width and the phase difference was built.Based on the high sensitivity of a surface plasmon resonance(SPR) sensor,the nanogap width between a light transmitting mirror and a reflector could be measured by detecting the phase difference between p-and s-polarizations of the light.Numerical simulation shows that the phase difference shifts from 150° to-150° by changing the nanogap width from-0.5 to 0.5 μm and the measured sensitivity of nanogap width is better than 1 nm.This nanogap measurement method can realize the measurement for the smallest gap below 10 nm and provides a simple and real-time operation beyond the physical diffraction limit.
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