Abstract
An in-process inspection method to detect electrical defects on an active-matrix LCD panel is proposed The present functional test of pixels utilizes an optical change sensing technique The proposed inspection system can identify the location and the type of line and point defects on an LCD panel, before the final assembly, by using a near infrared laser in a nondestructive manner with high spatial and voltage resolutions It can also estimate thin film transistor characteristics such as switching time, threshold voltage, and channel conductance
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