Abstract
Abstract— Improved methods for testing thin‐film‐transistor (TFT) arrays are becoming increasingly important as TFT liquid‐crystal flat‐panel displays become the first choice in many applications. The in‐process method of functionally testing arrays described in this paper uses an optical charge‐sensing technique to identify the location and type of line and point defects. The method is non‐destructive and provides data which can be used to repair certain types of array defects. It can also be used to measure such TFT parameters as frequency response, threshold voltage, and channel conductance.
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