Abstract
The Kaufman type ion source with a broad beam has been redesigned for high-current and low-energy ion beam sputtering. The three-grid ion extraction system was employed for low-energy operations. The computer simulations of ion beam trajectories were carried out to obtain the suitable geometrical conditions for the aperture diameters, the grid thickness and the grid separations. A significant improvement in low-energy ion beam extraction efficiency was successful achieved.
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