ワイヤプローブを用いた微細貫通形状計測装置の開発

Abstract

This paper describes the developed system to measure accuracy of the fine contour shape of the penetrated specimen. Examples, usually, the accuracy of the parts machined by wire EDM are measured with a projector. But it can not be useful to check the error of shape in a cross section at any desired height, except at the top and bottom surfaces of the specimen. The developed system uses the fine wire as a probe having partially convex shape. The wire probe moves along the programmed contour path, and approaches to the surface of specimen with 1μm step in a cross section at the desired height. The touching of the wire probe to the specimen is found from the wire displacement at the outside of the specimen. The wire displacement is detected with the developed measuring instrument composed with optical fibers and slits. Some difficulties to function this system are discussed and the countermeasures of them are proposed. And also the possibility and the method to use it for submicron measurement are discussed. It was found that this system is useful to measure the accuracy of specimen in a cross section at any height of specimen.