Abstract
We describe a system developed to measure the fine contour shape of a penetrated specimen. The system uses a fine wire as a probe having a partially circular convex shape. The wire probe moves along the programmed contour path, and approaches the surface of the specimen in a cross section at the desired height. The contact of the wire probe to the specimen is detected based on the displacement of the wire probe on the outside of the specimen. The displacement of the wire is measured with an optical detector we have developed. The measured results and the possibility of using the system for submicron measurement are described.
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