Abstract
In this paper, a tunable VCSEL (Vertical Cavity Surface Emitting Laser) fabricated by high precision bonding of a half VCSEL chip and a Si chip with a concave mirror on a movable membrane is presented. A tuning range of 55nm, a wavelength modulation over 500kHz, a peak power of 3.5mW and a side mode suppression ratio of about 60dB, and the structure and the fabrication process of the MEMS-VCSEL have been presented. Tunable lasers with wide tuning range and fast wavelength modulation with continuous wavelength sweep are suitable for optical measurement applications, such as optical fiber sensing, gas sensors, and OCT (Optical Coherence Tomography).
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